Mass flow controller

This is a compact handy flow control/measuring unit made by combining a compact DIN72 x72 power indicator [CR-400] and MFC/MFM.

Model 3200 Series Mass Flow Controller is an advanced model designed as a successor of the 3910 Series that enjoys a wide use for diverse applications such as manu-facture of semiconductors, LCDs, combustion equipment, analytical devices, and biotechnology fields. Its high per-formance is equal to a new standard of KOFLOC.

Model 3660 Series Mass Flow Controller has been devel-oped centering the focus on compactness and low cost and is being acclaimed by a wide range of users for di-verse applications, including from laboratory research and development activities to the use as a standard mass flow control model for various types of analyzers and vacuum devices in the production line. Varieties of derived models and options are available.

DF-550C is now released as an all-metal model of the high-performance digital mass flow controller DF-250C Series. The metal sealed structure enables controlling the measurement of corrosive gases such as semiconductor process gases.

The Model DF-350 Series is a digital mass flow controller with an integral indicator that operates on a 24-V power supply. It offers features equivalent to the DF-250 Series designed for up to 50 SLM.

The Model DF-300C Series is a mass flow controller with an integral indicator that operates on a 24-V power supply, as developed in response to the requests from users of the DF Series. It inherits the features of the DF-200C Series with enhanced convenience, including accuracy of ±1% S.P., response ≤1 sec (in all ranges), and the multiple-gas, multiple-range versatility, i.e., support of seven gases (including reference gas) and the ease of changing the flow rate range of each gas.

The DF-250 series is a high performance digital mass flow controller with ≤1 sec response less than 50SLM specification. The series offers large flow rate line-up up to 300SLM.

The DF-200 series is a high performance digital mass flow controller with ±1%S.P. accuracy and ≤1 sec response. It also has multple-gas and multiple-range function of seven gases and the ease of changing the flow rate range of each gases.

Model 5100 Series Mass Flow Controller/Meter features weldless structure, metal seals, accurac y of ≤±1%, re-sponse of ≤±1 second and other basic performance con-ditions required for semiconductor process control, and additionally, has achieved a significant price reduction.

The Model 5400 Series is a successor to the Model 3440, with enhanced basic capabilities. The appearance is similar to the conventional MFC. The sensor drive system is improved: the zero-drift is further reduced and the re-sponse in the lower range is improved. The Model 5410 Series is a mass flow meter with the same body design as that of the 5400 Series.

This mass flow controller/meter driven by a 24 VDC power supply has been developed as a successor to the MODEL8300.

This mass fl ow controller/meter driven by a 24 VDC power supply has been developed as a successor to the MODEL8300.